High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development
J. Bürger, H. Venugopal, D. Kool, M.T. de los Arcos de Pedro, A. Gonzalez Orive, G. Grundmeier, K. Brassat, J. Lindner, Advanced Materials Interfaces 9 (2022).
Download
No fulltext has been uploaded.
Journal Article
| Published
| English
Author
Bürger, JuliusLibreCat;
Venugopal, Harikrishnan;
Kool, DanielLibreCat;
de los Arcos de Pedro, Maria TeresaLibreCat;
Gonzalez Orive, Alejandro;
Grundmeier, GuidoLibreCat;
Brassat, KatharinaLibreCat;
Lindner, JörgLibreCat
Keywords
Publishing Year
Journal Title
Advanced Materials Interfaces
Volume
9
Issue
26
Article Number
2200962
LibreCat-ID
Cite this
Bürger J, Venugopal H, Kool D, et al. High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development. Advanced Materials Interfaces. 2022;9(26). doi:10.1002/admi.202200962
Bürger, J., Venugopal, H., Kool, D., de los Arcos de Pedro, M. T., Gonzalez Orive, A., Grundmeier, G., Brassat, K., & Lindner, J. (2022). High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development. Advanced Materials Interfaces, 9(26), Article 2200962. https://doi.org/10.1002/admi.202200962
@article{Bürger_Venugopal_Kool_de los Arcos de Pedro_Gonzalez Orive_Grundmeier_Brassat_Lindner_2022, title={High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development}, volume={9}, DOI={10.1002/admi.202200962}, number={262200962}, journal={Advanced Materials Interfaces}, publisher={Wiley}, author={Bürger, Julius and Venugopal, Harikrishnan and Kool, Daniel and de los Arcos de Pedro, Maria Teresa and Gonzalez Orive, Alejandro and Grundmeier, Guido and Brassat, Katharina and Lindner, Jörg}, year={2022} }
Bürger, Julius, Harikrishnan Venugopal, Daniel Kool, Maria Teresa de los Arcos de Pedro, Alejandro Gonzalez Orive, Guido Grundmeier, Katharina Brassat, and Jörg Lindner. “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development.” Advanced Materials Interfaces 9, no. 26 (2022). https://doi.org/10.1002/admi.202200962.
J. Bürger et al., “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development,” Advanced Materials Interfaces, vol. 9, no. 26, Art. no. 2200962, 2022, doi: 10.1002/admi.202200962.
Bürger, Julius, et al. “High‐Resolution Study of Changes in Morphology and Chemistry of Cylindrical PS‐ b ‐PMMA Block Copolymer Nanomasks during Mask Development.” Advanced Materials Interfaces, vol. 9, no. 26, 2200962, Wiley, 2022, doi:10.1002/admi.202200962.
Google Scholar