Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation
X. Xie, M.T. de los Arcos de Pedro, G. Grundmeier, Plasma Processes and Polymers 19 (2022).
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Journal Title
Plasma Processes and Polymers
Volume
19
Issue
11
Article Number
2200052
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Xie X, de los Arcos de Pedro MT, Grundmeier G. Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers. 2022;19(11). doi:10.1002/ppap.202200052
Xie, X., de los Arcos de Pedro, M. T., & Grundmeier, G. (2022). Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation. Plasma Processes and Polymers, 19(11), Article 2200052. https://doi.org/10.1002/ppap.202200052
@article{Xie_de los Arcos de Pedro_Grundmeier_2022, title={Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation}, volume={19}, DOI={10.1002/ppap.202200052}, number={112200052}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Xie, Xiaofan and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido}, year={2022} }
Xie, Xiaofan, Maria Teresa de los Arcos de Pedro, and Guido Grundmeier. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers 19, no. 11 (2022). https://doi.org/10.1002/ppap.202200052.
X. Xie, M. T. de los Arcos de Pedro, and G. Grundmeier, “Comparative analysis of hexamethyldisiloxane and hexamethyldisilazane plasma polymer thin films before and after plasma oxidation,” Plasma Processes and Polymers, vol. 19, no. 11, Art. no. 2200052, 2022, doi: 10.1002/ppap.202200052.
Xie, Xiaofan, et al. “Comparative Analysis of Hexamethyldisiloxane and Hexamethyldisilazane Plasma Polymer Thin Films before and after Plasma Oxidation.” Plasma Processes and Polymers, vol. 19, no. 11, 2200052, Wiley, 2022, doi:10.1002/ppap.202200052.
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