Silicon oxynitride microdisk resonators for integrated waveguide coupling

T. Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, A. Zrenner, in: Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, 2016, pp. 400–403.

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Conference Paper | Published | English
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Proceedings Title
Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
Page
400 - 403
Conference
Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016
Conference Location
Munich
Conference Date
2016-03-09 – 2016-03-10
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Hett T, Frers T, Widhalm A, Berth G, Hilleringmann U, Zrenner A. Silicon oxynitride microdisk resonators for integrated waveguide coupling. In: Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016. Munich; 2016:400-403.
Hett, T., Frers, T., Widhalm, A., Berth, G., Hilleringmann, U., & Zrenner, A. (2016). Silicon oxynitride microdisk resonators for integrated waveguide coupling. In Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016 (pp. 400–403). Munich.
@inproceedings{Hett_Frers_Widhalm_Berth_Hilleringmann_Zrenner_2016, place={Munich}, title={Silicon oxynitride microdisk resonators for integrated waveguide coupling}, booktitle={Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016}, author={Hett, Thomas and Frers, Torsten and Widhalm, Alex and Berth, Gerhard and Hilleringmann, Ulrich and Zrenner, Artur}, year={2016}, pages={400–403} }
Hett, Thomas, Torsten Frers, Alex Widhalm, Gerhard Berth, Ulrich Hilleringmann, and Artur Zrenner. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” In Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, 400–403. Munich, 2016.
T. Hett, T. Frers, A. Widhalm, G. Berth, U. Hilleringmann, and A. Zrenner, “Silicon oxynitride microdisk resonators for integrated waveguide coupling,” in Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, Munich, 2016, pp. 400–403.
Hett, Thomas, et al. “Silicon Oxynitride Microdisk Resonators for Integrated Waveguide Coupling.” Smart Systems Integration 2016 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, SSI 2016, 2016, pp. 400–03.

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