Reactive ion etching of CVD-diamond for piezoresistive pressure sensors
R. Otterbach, U. Hilleringmann, Diamond and Related Materials 11 (2002) 841–844.
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| English
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Otterbach, R.;
Hilleringmann, UlrichLibreCat
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Journal Title
Diamond and Related Materials
Volume
11
Issue
3-6
Page
841-844
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Otterbach R, Hilleringmann U. Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials. 2002;11(3-6):841-844. doi:10.1016/s0925-9635(01)00703-8
Otterbach, R., & Hilleringmann, U. (2002). Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials, 11(3–6), 841–844. https://doi.org/10.1016/s0925-9635(01)00703-8
@article{Otterbach_Hilleringmann_2002, title={Reactive ion etching of CVD-diamond for piezoresistive pressure sensors}, volume={11}, DOI={10.1016/s0925-9635(01)00703-8}, number={3–6}, journal={Diamond and Related Materials}, publisher={Elsevier BV}, author={Otterbach, R. and Hilleringmann, Ulrich}, year={2002}, pages={841–844} }
Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” Diamond and Related Materials 11, no. 3–6 (2002): 841–44. https://doi.org/10.1016/s0925-9635(01)00703-8.
R. Otterbach and U. Hilleringmann, “Reactive ion etching of CVD-diamond for piezoresistive pressure sensors,” Diamond and Related Materials, vol. 11, no. 3–6, pp. 841–844, 2002, doi: 10.1016/s0925-9635(01)00703-8.
Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” Diamond and Related Materials, vol. 11, no. 3–6, Elsevier BV, 2002, pp. 841–44, doi:10.1016/s0925-9635(01)00703-8.
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