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2 Publications
2002 | Journal Article | LibreCat-ID: 39876
Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications
R. Otterbach, U. Hilleringmann, T.J. Horstmann, K. Goser, Diamond and Related Materials 10 (2002) 511–514.
LibreCat
| DOI
R. Otterbach, U. Hilleringmann, T.J. Horstmann, K. Goser, Diamond and Related Materials 10 (2002) 511–514.
2002 | Journal Article | LibreCat-ID: 39874
Reactive ion etching of CVD-diamond for piezoresistive pressure sensors
R. Otterbach, U. Hilleringmann, Diamond and Related Materials 11 (2002) 841–844.
LibreCat
| DOI
R. Otterbach, U. Hilleringmann, Diamond and Related Materials 11 (2002) 841–844.