Nanometer Scale Lateral Structures of MOS Type Layers
U. Hilleringmann, T. Vieregge, J. Horstmann, in: Proceedings Micro. Tec, 2000, pp. 49–53.
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Hilleringmann, UlrichLibreCat;
Vieregge, T;
Horstmann, JT
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Proceedings Micro. tec
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49–53
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Hilleringmann U, Vieregge T, Horstmann J. Nanometer Scale Lateral Structures of MOS Type Layers. In: Proceedings Micro. Tec. ; 2000:49–53.
Hilleringmann, U., Vieregge, T., & Horstmann, J. (2000). Nanometer Scale Lateral Structures of MOS Type Layers. Proceedings Micro. Tec, 49–53.
@inproceedings{Hilleringmann_Vieregge_Horstmann_2000, title={Nanometer Scale Lateral Structures of MOS Type Layers}, booktitle={Proceedings Micro. tec}, author={Hilleringmann, Ulrich and Vieregge, T and Horstmann, JT}, year={2000}, pages={49–53} }
Hilleringmann, Ulrich, T Vieregge, and JT Horstmann. “Nanometer Scale Lateral Structures of MOS Type Layers.” In Proceedings Micro. Tec, 49–53, 2000.
U. Hilleringmann, T. Vieregge, and J. Horstmann, “Nanometer Scale Lateral Structures of MOS Type Layers,” in Proceedings Micro. tec, 2000, pp. 49–53.
Hilleringmann, Ulrich, et al. “Nanometer Scale Lateral Structures of MOS Type Layers.” Proceedings Micro. Tec, 2000, pp. 49–53.
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