High rate CVD-diamond etching for high temperature pressure sensor applications
R. Otterbach, U. Hilleringmann, in: 29th European Solid-State Device Research Conference, 1999, pp. 320–323.
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Otterbach, R.;
Hilleringmann, UlrichLibreCat
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29th European Solid-State Device Research Conference
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1
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320-323
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Otterbach R, Hilleringmann U. High rate CVD-diamond etching for high temperature pressure sensor applications. In: 29th European Solid-State Device Research Conference. Vol 1. ; 1999:320-323.
Otterbach, R., & Hilleringmann, U. (1999). High rate CVD-diamond etching for high temperature pressure sensor applications. 29th European Solid-State Device Research Conference, 1, 320–323.
@inproceedings{Otterbach_Hilleringmann_1999, title={High rate CVD-diamond etching for high temperature pressure sensor applications}, volume={1}, booktitle={29th European Solid-State Device Research Conference}, author={Otterbach, R. and Hilleringmann, Ulrich}, year={1999}, pages={320–323} }
Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” In 29th European Solid-State Device Research Conference, 1:320–23, 1999.
R. Otterbach and U. Hilleringmann, “High rate CVD-diamond etching for high temperature pressure sensor applications,” in 29th European Solid-State Device Research Conference, 1999, vol. 1, pp. 320–323.
Otterbach, R., and Ulrich Hilleringmann. “High Rate CVD-Diamond Etching for High Temperature Pressure Sensor Applications.” 29th European Solid-State Device Research Conference, vol. 1, 1999, pp. 320–23.
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