The influence of the sphere material on the opening size distribution of nanosphere lithography masks

T. Riedl, J. Lindner, (2017).

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Conference Paper | English
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Conference
E-MRS Spring Meeting 2017
Conference Location
Strasburg (France)
Conference Date
2017-05-22 – 2017-05-26
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Riedl T, Lindner J. The influence of the sphere material on the opening size distribution of nanosphere lithography masks. 2017.
Riedl, T., & Lindner, J. (2017). The influence of the sphere material on the opening size distribution of nanosphere lithography masks. Presented at the E-MRS Spring Meeting 2017, Strasburg (France).
@article{Riedl_Lindner_2017, series={poster V.14.62}, title={The influence of the sphere material on the opening size distribution of nanosphere lithography masks}, author={Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={poster V.14.62} }
Riedl, Thomas, and Jörg Lindner. “The Influence of the Sphere Material on the Opening Size Distribution of Nanosphere Lithography Masks.” Poster V.14.62, 2017.
T. Riedl and J. Lindner, “The influence of the sphere material on the opening size distribution of nanosphere lithography masks.” 2017.
Riedl, Thomas, and Jörg Lindner. The Influence of the Sphere Material on the Opening Size Distribution of Nanosphere Lithography Masks. 2017.

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