Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon
U. Hilleringmann, S. Adams, K. Goser, in: ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390.
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Hilleringmann, UlrichLibreCat;
Adams, S.;
Goser, K.
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ESSDERC ’94: 24th European Solid State Device Research Conference
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387-390
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Hilleringmann U, Adams S, Goser K. Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. In: ESSDERC ’94: 24th European Solid State Device Research Conference. ; 1994:387-390.
Hilleringmann, U., Adams, S., & Goser, K. (1994). Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon. ESSDERC ’94: 24th European Solid State Device Research Conference, 387–390.
@inproceedings{Hilleringmann_Adams_Goser_1994, title={Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon}, booktitle={ESSDERC ’94: 24th European Solid State Device Research Conference}, author={Hilleringmann, Ulrich and Adams, S. and Goser, K.}, year={1994}, pages={387–390} }
Hilleringmann, Ulrich, S. Adams, and K. Goser. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” In ESSDERC ’94: 24th European Solid State Device Research Conference, 387–90, 1994.
U. Hilleringmann, S. Adams, and K. Goser, “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon,” in ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–390.
Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Amplifiers on Silicon.” ESSDERC ’94: 24th European Solid State Device Research Conference, 1994, pp. 387–90.
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