Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography
C. Brodehl, T. Riedl, S. Greulich-Weber, J. Lindner, in: 2015.
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Conference Paper
| English
Author
Publishing Year
Conference
E-MRS Spring Meeting 2015
Conference Location
Lille (France)
Conference Date
2015-05-11 – 2015-05-15
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Brodehl C, Riedl T, Greulich-Weber S, Lindner J. Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. In: ; 2015.
Brodehl, C., Riedl, T., Greulich-Weber, S., & Lindner, J. (2015). Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography. Presented at the E-MRS Spring Meeting 2015, Lille (France).
@inproceedings{Brodehl_Riedl_Greulich-Weber_Lindner_2015, title={Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography}, author={Brodehl, Christoph and Riedl, Thomas and Greulich-Weber, Siegmund and Lindner, Jörg}, year={2015} }
Brodehl, Christoph, Thomas Riedl, Siegmund Greulich-Weber, and Jörg Lindner. “Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography,” 2015.
C. Brodehl, T. Riedl, S. Greulich-Weber, and J. Lindner, “Three-dimensional analysis of mask-clogging effects on the morphology of nanoparticles fabricated by nanosphere lithography,” presented at the E-MRS Spring Meeting 2015, Lille (France), 2015.
Brodehl, Christoph, et al. Three-Dimensional Analysis of Mask-Clogging Effects on the Morphology of Nanoparticles Fabricated by Nanosphere Lithography. 2015.
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