Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures

L. Hiller, T. Stauden, R.M. Kemper, J. Lindner, D.J. As, J. Pezoldt, Materials Science Forum 778–780 (2014) 730–733.

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Journal Article | Published | English
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Abstract
An anisotropic etching process for mesa structures using fluorinated plasma with hydrogen addition was developed in an electron cyclotron resonance setup. The evolution of the mesa morphology was studied in dependence on the gas composition, the applied bias and the pressure. The achieved side wall slope approached 90° with a negligible trenching. The aspect ratios of the fabricated structure in the developed residue free ECR plasma etching process were between 5 and 20.
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Journal Title
Materials Science Forum
Volume
778-780
Page
730-733
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Hiller L, Stauden T, Kemper RM, Lindner J, As DJ, Pezoldt J. Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. Materials Science Forum. 2014;778-780:730-733. doi:10.4028/www.scientific.net/msf.778-780.730
Hiller, L., Stauden, T., Kemper, R. M., Lindner, J., As, D. J., & Pezoldt, J. (2014). Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. Materials Science Forum, 778780, 730–733. https://doi.org/10.4028/www.scientific.net/msf.778-780.730
@article{Hiller_Stauden_Kemper_Lindner_As_Pezoldt_2014, title={Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures}, volume={778–780}, DOI={10.4028/www.scientific.net/msf.778-780.730}, journal={Materials Science Forum}, publisher={Trans Tech Publications}, author={Hiller, Lars and Stauden, Thomas and Kemper, Ricarda M. and Lindner, Jörg and As, Donat J. and Pezoldt, Jörg}, year={2014}, pages={730–733} }
Hiller, Lars, Thomas Stauden, Ricarda M. Kemper, Jörg Lindner, Donat J. As, and Jörg Pezoldt. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” Materials Science Forum 778–780 (2014): 730–33. https://doi.org/10.4028/www.scientific.net/msf.778-780.730.
L. Hiller, T. Stauden, R. M. Kemper, J. Lindner, D. J. As, and J. Pezoldt, “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures,” Materials Science Forum, vol. 778–780, pp. 730–733, 2014.
Hiller, Lars, et al. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” Materials Science Forum, vol. 778–780, Trans Tech Publications, 2014, pp. 730–33, doi:10.4028/www.scientific.net/msf.778-780.730.
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