Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures
L. Hiller, T. Stauden, R.M. Kemper, J. Lindner, D.J. As, J. Pezoldt, Materials Science Forum 778–780 (2014) 730–733.
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Journal Article
| Published
| English
Author
Hiller, Lars;
Stauden, Thomas;
Kemper, Ricarda M.;
Lindner, JörgLibreCat;
As, Donat J.LibreCat 
;
Pezoldt, Jörg
;
Pezoldt, JörgAbstract
An anisotropic etching process for mesa structures using fluorinated plasma with
hydrogen addition was developed in an electron cyclotron resonance setup. The evolution of the
mesa morphology was studied in dependence on the gas composition, the applied bias and the
pressure. The achieved side wall slope approached 90° with a negligible trenching. The aspect ratios
of the fabricated structure in the developed residue free ECR plasma etching process were between
5 and 20.
Publishing Year
Journal Title
Materials Science Forum
Volume
778-780
Page
730-733
ISSN
LibreCat-ID
Cite this
Hiller L, Stauden T, Kemper RM, Lindner J, As DJ, Pezoldt J. Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. Materials Science Forum. 2014;778-780:730-733. doi:10.4028/www.scientific.net/msf.778-780.730
Hiller, L., Stauden, T., Kemper, R. M., Lindner, J., As, D. J., & Pezoldt, J. (2014). Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures. Materials Science Forum, 778–780, 730–733. https://doi.org/10.4028/www.scientific.net/msf.778-780.730
@article{Hiller_Stauden_Kemper_Lindner_As_Pezoldt_2014, title={Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures}, volume={778–780}, DOI={10.4028/www.scientific.net/msf.778-780.730}, journal={Materials Science Forum}, publisher={Trans Tech Publications}, author={Hiller, Lars and Stauden, Thomas and Kemper, Ricarda M. and Lindner, Jörg and As, Donat J. and Pezoldt, Jörg}, year={2014}, pages={730–733} }
Hiller, Lars, Thomas Stauden, Ricarda M. Kemper, Jörg Lindner, Donat J. As, and Jörg Pezoldt. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” Materials Science Forum 778–780 (2014): 730–33. https://doi.org/10.4028/www.scientific.net/msf.778-780.730.
L. Hiller, T. Stauden, R. M. Kemper, J. Lindner, D. J. As, and J. Pezoldt, “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures,” Materials Science Forum, vol. 778–780, pp. 730–733, 2014, doi: 10.4028/www.scientific.net/msf.778-780.730.
Hiller, Lars, et al. “Hydrogen Effects in ECR-Etching of 3C-SiC(100) Mesa Structures.” Materials Science Forum, vol. 778–780, Trans Tech Publications, 2014, pp. 730–33, doi:10.4028/www.scientific.net/msf.778-780.730.
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