Nanosphere lithography for device fabrication
J. Lindner, SPIE Newsroom (2013).
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Lindner J. Nanosphere lithography for device fabrication. SPIE Newsroom. 2013. doi:10.1117/2.1201310.005154
Lindner, J. (2013). Nanosphere lithography for device fabrication. SPIE Newsroom. https://doi.org/10.1117/2.1201310.005154
@article{Lindner_2013, title={Nanosphere lithography for device fabrication}, DOI={10.1117/2.1201310.005154}, journal={SPIE Newsroom}, publisher={SPIE-Intl Soc Optical Eng}, author={Lindner, Jörg}, year={2013} }
Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” SPIE Newsroom, 2013. https://doi.org/10.1117/2.1201310.005154.
J. Lindner, “Nanosphere lithography for device fabrication,” SPIE Newsroom, 2013.
Lindner, Jörg. “Nanosphere Lithography for Device Fabrication.” SPIE Newsroom, SPIE-Intl Soc Optical Eng, 2013, doi:10.1117/2.1201310.005154.
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