Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging
M. Finkeldey, L. Göring, F. Schellenberg, C. Brenner, N.C. Gerhardt, M.R. Hofmann, in: Photonic Instrumentation Engineering IV, 2017.
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Conference Paper
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Author
Finkeldey, Markus;
Göring, Lena;
Schellenberg, Falk;
Brenner, Carsten;
Gerhardt, Nils ChristopherLibreCat 
;
Hofmann, Martin R.
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Hofmann, Martin R.Publishing Year
Proceedings Title
Photonic Instrumentation Engineering IV
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Finkeldey M, Göring L, Schellenberg F, Brenner C, Gerhardt NC, Hofmann MR. Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging. In: Photonic Instrumentation Engineering IV. ; 2017. doi:10.1117/12.2250912
Finkeldey, M., Göring, L., Schellenberg, F., Brenner, C., Gerhardt, N. C., & Hofmann, M. R. (2017). Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging. Photonic Instrumentation Engineering IV. https://doi.org/10.1117/12.2250912
@inproceedings{Finkeldey_Göring_Schellenberg_Brenner_Gerhardt_Hofmann_2017, title={Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging}, DOI={10.1117/12.2250912}, booktitle={Photonic Instrumentation Engineering IV}, author={Finkeldey, Markus and Göring, Lena and Schellenberg, Falk and Brenner, Carsten and Gerhardt, Nils Christopher and Hofmann, Martin R.}, year={2017} }
Finkeldey, Markus, Lena Göring, Falk Schellenberg, Carsten Brenner, Nils Christopher Gerhardt, and Martin R. Hofmann. “Multimodal Backside Imaging of a Microcontroller Using Confocal Laser Scanning and Optical-Beam-Induced Current Imaging.” In Photonic Instrumentation Engineering IV, 2017. https://doi.org/10.1117/12.2250912.
M. Finkeldey, L. Göring, F. Schellenberg, C. Brenner, N. C. Gerhardt, and M. R. Hofmann, “Multimodal backside imaging of a microcontroller using confocal laser scanning and optical-beam-induced current imaging,” 2017, doi: 10.1117/12.2250912.
Finkeldey, Markus, et al. “Multimodal Backside Imaging of a Microcontroller Using Confocal Laser Scanning and Optical-Beam-Induced Current Imaging.” Photonic Instrumentation Engineering IV, 2017, doi:10.1117/12.2250912.
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