Optical metrology for the investigation of buried technical structures
M. Finkeldey, F. Schellenberg, C. Brenner, M.R. Hofmann, N.C. Gerhardt, L. Göring, Technisches Messen 85 (2017) 104–110.
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Journal Article
| English
Author
Finkeldey, Markus;
Schellenberg, Falk;
Brenner, Carsten;
Hofmann, Martin R.;
Gerhardt, Nils ChristopherLibreCat 
;
Göring, Lena
;
Göring, LenaPublishing Year
Journal Title
Technisches Messen
Volume
85
Issue
2
Page
104 - 110
LibreCat-ID
Cite this
Finkeldey M, Schellenberg F, Brenner C, Hofmann MR, Gerhardt NC, Göring L. Optical metrology for the investigation of buried technical structures. Technisches Messen. 2017;85(2):104-110. doi:10.1515/teme-2017-0096
Finkeldey, M., Schellenberg, F., Brenner, C., Hofmann, M. R., Gerhardt, N. C., & Göring, L. (2017). Optical metrology for the investigation of buried technical structures. Technisches Messen, 85(2), 104–110. https://doi.org/10.1515/teme-2017-0096
@article{Finkeldey_Schellenberg_Brenner_Hofmann_Gerhardt_Göring_2017, title={Optical metrology for the investigation of buried technical structures}, volume={85}, DOI={10.1515/teme-2017-0096}, number={2}, journal={Technisches Messen}, author={Finkeldey, Markus and Schellenberg, Falk and Brenner, Carsten and Hofmann, Martin R. and Gerhardt, Nils Christopher and Göring, Lena}, year={2017}, pages={104–110} }
Finkeldey, Markus, Falk Schellenberg, Carsten Brenner, Martin R. Hofmann, Nils Christopher Gerhardt, and Lena Göring. “Optical Metrology for the Investigation of Buried Technical Structures.” Technisches Messen 85, no. 2 (2017): 104–10. https://doi.org/10.1515/teme-2017-0096.
M. Finkeldey, F. Schellenberg, C. Brenner, M. R. Hofmann, N. C. Gerhardt, and L. Göring, “Optical metrology for the investigation of buried technical structures,” Technisches Messen, vol. 85, no. 2, pp. 104–110, 2017, doi: 10.1515/teme-2017-0096.
Finkeldey, Markus, et al. “Optical Metrology for the Investigation of Buried Technical Structures.” Technisches Messen, vol. 85, no. 2, 2017, pp. 104–10, doi:10.1515/teme-2017-0096.
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