Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy
R.Y.W. Lai, N. Koukourakis, N.C. Gerhardt, S. Hamann, M. Ehmann, K. Hackl, A. Ludwig, R. Meyer, M.R. Hofmann, E. Darakis, Journal of Microelectromechanical Systems 19 (2010) 1175–1179.
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Journal Article
| English
Author
Lai, Ryan Yiu Wai;
Koukourakis, Nektarios;
Gerhardt, Nils ChristopherLibreCat 
;
Hamann, Sven;
Ehmann, Michael;
Hackl, Klaus;
Ludwig, Alfred;
Meyer, Robert;
Hofmann, Martin R.;
Darakis, Emmanouil
;
Hamann, Sven;
Ehmann, Michael;
Hackl, Klaus;
Ludwig, Alfred;
Meyer, Robert;
Hofmann, Martin R.;
Darakis, EmmanouilPublishing Year
Journal Title
Journal of microelectromechanical systems
Volume
19
Issue
5
Page
1175 - 1179
LibreCat-ID
Cite this
Lai RYW, Koukourakis N, Gerhardt NC, et al. Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy. Journal of microelectromechanical systems. 2010;19(5):1175-1179. doi:10.1109/jmems.2010.2067442
Lai, R. Y. W., Koukourakis, N., Gerhardt, N. C., Hamann, S., Ehmann, M., Hackl, K., Ludwig, A., Meyer, R., Hofmann, M. R., & Darakis, E. (2010). Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy. Journal of Microelectromechanical Systems, 19(5), 1175–1179. https://doi.org/10.1109/jmems.2010.2067442
@article{Lai_Koukourakis_Gerhardt_Hamann_Ehmann_Hackl_Ludwig_Meyer_Hofmann_Darakis_2010, title={Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy}, volume={19}, DOI={10.1109/jmems.2010.2067442}, number={5}, journal={Journal of microelectromechanical systems}, author={Lai, Ryan Yiu Wai and Koukourakis, Nektarios and Gerhardt, Nils Christopher and Hamann, Sven and Ehmann, Michael and Hackl, Klaus and Ludwig, Alfred and Meyer, Robert and Hofmann, Martin R. and Darakis, Emmanouil}, year={2010}, pages={1175–1179} }
Lai, Ryan Yiu Wai, Nektarios Koukourakis, Nils Christopher Gerhardt, Sven Hamann, Michael Ehmann, Klaus Hackl, Alfred Ludwig, Robert Meyer, Martin R. Hofmann, and Emmanouil Darakis. “Integrity of Micro-Hotplates during High-Temperature Operation Monitored by Digital Holographic Microscopy.” Journal of Microelectromechanical Systems 19, no. 5 (2010): 1175–79. https://doi.org/10.1109/jmems.2010.2067442.
R. Y. W. Lai et al., “Integrity of micro-hotplates during high-temperature operation monitored by digital holographic microscopy,” Journal of microelectromechanical systems, vol. 19, no. 5, pp. 1175–1179, 2010, doi: 10.1109/jmems.2010.2067442.
Lai, Ryan Yiu Wai, et al. “Integrity of Micro-Hotplates during High-Temperature Operation Monitored by Digital Holographic Microscopy.” Journal of Microelectromechanical Systems, vol. 19, no. 5, 2010, pp. 1175–79, doi:10.1109/jmems.2010.2067442.
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