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1 Publication
2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, Ulrich. “Metallisierung Und Kontakte.” In Silizium-Halbleitertechnologie, 131–151. Wiesbaden: Vieweg+Teubner Verlag, 2002. https://doi.org/10.1007/978-3-322-94119-0_8.
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