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1 Publication
2002 | Book Chapter | LibreCat-ID: 39875
Hilleringmann, U. (2002). Metallisierung und Kontakte. In Silizium-Halbleitertechnologie (pp. 131–151). Vieweg+Teubner Verlag. https://doi.org/10.1007/978-3-322-94119-0_8
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