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11 Publications
2012 | Journal Article | LibreCat-ID: 22604
The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure
R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.
LibreCat
| DOI
R. Reuter, K. Rügner, D. Ellerweg, M.T. de los Arcos de Pedro, A. von Keudell, J. Benedikt, Plasma Processes and Polymers (2012) 1116–1124.