Please note that LibreCat no longer supports Internet Explorer versions 8 or 9 (or earlier).
We recommend upgrading to the latest Internet Explorer, Google Chrome, or Firefox.
11 Publications
2012 | Journal Article | LibreCat-ID: 22604
Reuter, Rüdiger, Katja Rügner, Dirk Ellerweg, Maria Teresa de los Arcos de Pedro, Achim von Keudell, and Jan Benedikt. “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure.” Plasma Processes and Polymers, 2012, 1116–24. https://doi.org/10.1002/ppap.201100146.
LibreCat
| DOI