Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching
M. Kismann, D.T. Riedl, P.D.J.K. Lindner, Materials Science in Semiconductor Processing (2021).
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Journal Article
| English
Author
Kismann, Michael;
Riedl, Dr. Thomas;
Lindner, Prof. Dr. Jörg KN
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Journal Title
Materials Science in Semiconductor Processing
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Kismann M, Riedl DT, Lindner PDJK. Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. Materials Science in Semiconductor Processing. 2021.
Kismann, M., Riedl, D. T., & Lindner, P. D. J. K. (2021). Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching. Materials Science in Semiconductor Processing.
@article{Kismann_Riedl_Lindner_2021, title={Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching}, journal={Materials Science in Semiconductor Processing}, author={Kismann, Michael and Riedl, Dr. Thomas and Lindner, Prof. Dr. Jörg KN}, year={2021} }
Kismann, Michael, Dr. Thomas Riedl, and Prof. Dr. Jörg KN Lindner. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” Materials Science in Semiconductor Processing, 2021.
M. Kismann, D. T. Riedl, and P. D. J. K. Lindner, “Ordered arrays of Si nanopillars with alternating diameters fabricated by nanosphere lithography and metal-assisted chemical etching,” Materials Science in Semiconductor Processing, 2021.
Kismann, Michael, et al. “Ordered Arrays of Si Nanopillars with Alternating Diameters Fabricated by Nanosphere Lithography and Metal-Assisted Chemical Etching.” Materials Science in Semiconductor Processing, 2021.
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