Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)
F. Mitschker, L. Schücke, C. Hoppe, M. Jaritz, R. Dahlmann, M.T. de los Arcos de Pedro, C. Hopmann, G. Grundmeier, P. Awakowicz, Journal of Physics D: Applied Physics (2018).
Download
No fulltext has been uploaded.
Journal Article
| Published
| English
Author
Mitschker, F;
Schücke, L;
Hoppe, Ch;
Jaritz, M;
Dahlmann, R;
de los Arcos de Pedro, Maria TeresaLibreCat;
Hopmann, Ch;
Grundmeier, GuidoLibreCat;
Awakowicz, P
Department
Publishing Year
Journal Title
Journal of Physics D: Applied Physics
Article Number
235201
LibreCat-ID
Cite this
Mitschker F, Schücke L, Hoppe C, et al. Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). Journal of Physics D: Applied Physics. Published online 2018. doi:10.1088/1361-6463/aac0ab
Mitschker, F., Schücke, L., Hoppe, C., Jaritz, M., Dahlmann, R., de los Arcos de Pedro, M. T., Hopmann, C., Grundmeier, G., & Awakowicz, P. (2018). Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO). Journal of Physics D: Applied Physics, Article 235201. https://doi.org/10.1088/1361-6463/aac0ab
@article{Mitschker_Schücke_Hoppe_Jaritz_Dahlmann_de los Arcos de Pedro_Hopmann_Grundmeier_Awakowicz_2018, title={Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO)}, DOI={10.1088/1361-6463/aac0ab}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Schücke, L and Hoppe, Ch and Jaritz, M and Dahlmann, R and de los Arcos de Pedro, Maria Teresa and Hopmann, Ch and Grundmeier, Guido and Awakowicz, P}, year={2018} }
Mitschker, F, L Schücke, Ch Hoppe, M Jaritz, R Dahlmann, Maria Teresa de los Arcos de Pedro, Ch Hopmann, Guido Grundmeier, and P Awakowicz. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” Journal of Physics D: Applied Physics, 2018. https://doi.org/10.1088/1361-6463/aac0ab.
F. Mitschker et al., “Comparative study on the deposition of silicon oxide permeation barrier coatings for polymers using hexamethyldisilazane (HMDSN) and hexamethyldisiloxane (HMDSO),” Journal of Physics D: Applied Physics, Art. no. 235201, 2018, doi: 10.1088/1361-6463/aac0ab.
Mitschker, F., et al. “Comparative Study on the Deposition of Silicon Oxide Permeation Barrier Coatings for Polymers Using Hexamethyldisilazane (HMDSN) and Hexamethyldisiloxane (HMDSO).” Journal of Physics D: Applied Physics, 235201, 2018, doi:10.1088/1361-6463/aac0ab.
Google Scholar