Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET
F. Mitschker, J. Wißing, C. Hoppe, M.T. de los Arcos de Pedro, G. Grundmeier, P. Awakowicz, Journal of Physics D: Applied Physics (2018).
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Journal Article
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| English
Author
Mitschker, F;
Wißing, J;
Hoppe, Ch;
de los Arcos de Pedro, Maria TeresaLibreCat;
Grundmeier, GuidoLibreCat;
Awakowicz, P
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Journal Title
Journal of Physics D: Applied Physics
Article Number
145201
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Mitschker F, Wißing J, Hoppe C, de los Arcos de Pedro MT, Grundmeier G, Awakowicz P. Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET. Journal of Physics D: Applied Physics. Published online 2018. doi:10.1088/1361-6463/aab1dd
Mitschker, F., Wißing, J., Hoppe, C., de los Arcos de Pedro, M. T., Grundmeier, G., & Awakowicz, P. (2018). Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET. Journal of Physics D: Applied Physics, Article 145201. https://doi.org/10.1088/1361-6463/aab1dd
@article{Mitschker_Wißing_Hoppe_de los Arcos de Pedro_Grundmeier_Awakowicz_2018, title={Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET}, DOI={10.1088/1361-6463/aab1dd}, number={145201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Wißing, J and Hoppe, Ch and de los Arcos de Pedro, Maria Teresa and Grundmeier, Guido and Awakowicz, P}, year={2018} }
Mitschker, F, J Wißing, Ch Hoppe, Maria Teresa de los Arcos de Pedro, Guido Grundmeier, and P Awakowicz. “Influence of Average Ion Energy and Atomic Oxygen Flux per Si Atom on the Formation of Silicon Oxide Permeation Barrier Coatings on PET.” Journal of Physics D: Applied Physics, 2018. https://doi.org/10.1088/1361-6463/aab1dd.
F. Mitschker, J. Wißing, C. Hoppe, M. T. de los Arcos de Pedro, G. Grundmeier, and P. Awakowicz, “Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET,” Journal of Physics D: Applied Physics, Art. no. 145201, 2018, doi: 10.1088/1361-6463/aab1dd.
Mitschker, F., et al. “Influence of Average Ion Energy and Atomic Oxygen Flux per Si Atom on the Formation of Silicon Oxide Permeation Barrier Coatings on PET.” Journal of Physics D: Applied Physics, 145201, 2018, doi:10.1088/1361-6463/aab1dd.
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