Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET

F. Mitschker, J. Wißing, C. Hoppe, T. de los Arcos, G. Grundmeier, P. Awakowicz, Journal of Physics D: Applied Physics (2018).

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Journal of Physics D: Applied Physics
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145201
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Mitschker F, Wißing J, Hoppe C, de los Arcos T, Grundmeier G, Awakowicz P. Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET. Journal of Physics D: Applied Physics. 2018. doi:10.1088/1361-6463/aab1dd
Mitschker, F., Wißing, J., Hoppe, C., de los Arcos, T., Grundmeier, G., & Awakowicz, P. (2018). Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/aab1dd
@article{Mitschker_Wißing_Hoppe_de los Arcos_Grundmeier_Awakowicz_2018, title={Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET}, DOI={10.1088/1361-6463/aab1dd}, number={145201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Wißing, J and Hoppe, Ch and de los Arcos, T and Grundmeier, G and Awakowicz, P}, year={2018} }
Mitschker, F, J Wißing, Ch Hoppe, T de los Arcos, G Grundmeier, and P Awakowicz. “Influence of Average Ion Energy and Atomic Oxygen Flux per Si Atom on the Formation of Silicon Oxide Permeation Barrier Coatings on PET.” Journal of Physics D: Applied Physics, 2018. https://doi.org/10.1088/1361-6463/aab1dd.
F. Mitschker, J. Wißing, C. Hoppe, T. de los Arcos, G. Grundmeier, and P. Awakowicz, “Influence of average ion energy and atomic oxygen flux per Si atom on the formation of silicon oxide permeation barrier coatings on PET,” Journal of Physics D: Applied Physics, 2018.
Mitschker, F., et al. “Influence of Average Ion Energy and Atomic Oxygen Flux per Si Atom on the Formation of Silicon Oxide Permeation Barrier Coatings on PET.” Journal of Physics D: Applied Physics, 145201, 2018, doi:10.1088/1361-6463/aab1dd.

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