Species transport on the target during high power impulse magnetron sputtering

V. Layes, S. Monje, C. Corbella, J. Trieschmann, T. de los Arcos, A. von Keudell, Applied Physics Letters (2017).

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Applied Physics Letters
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081603
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Layes V, Monje S, Corbella C, Trieschmann J, de los Arcos T, von Keudell A. Species transport on the target during high power impulse magnetron sputtering. Applied Physics Letters. 2017. doi:10.1063/1.4976999
Layes, V., Monje, S., Corbella, C., Trieschmann, J., de los Arcos, T., & von Keudell, A. (2017). Species transport on the target during high power impulse magnetron sputtering. Applied Physics Letters. https://doi.org/10.1063/1.4976999
@article{Layes_Monje_Corbella_Trieschmann_de los Arcos_von Keudell_2017, title={Species transport on the target during high power impulse magnetron sputtering}, DOI={10.1063/1.4976999}, number={081603}, journal={Applied Physics Letters}, author={Layes, V. and Monje, S. and Corbella, C. and Trieschmann, J. and de los Arcos, T. and von Keudell, A.}, year={2017} }
Layes, V., S. Monje, C. Corbella, J. Trieschmann, T. de los Arcos, and A. von Keudell. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” Applied Physics Letters, 2017. https://doi.org/10.1063/1.4976999.
V. Layes, S. Monje, C. Corbella, J. Trieschmann, T. de los Arcos, and A. von Keudell, “Species transport on the target during high power impulse magnetron sputtering,” Applied Physics Letters, 2017.
Layes, V., et al. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” Applied Physics Letters, 081603, 2017, doi:10.1063/1.4976999.

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