Species transport on the target during high power impulse magnetron sputtering
V. Layes, S. Monje, C. Corbella, J. Trieschmann, M.T. de los Arcos de Pedro, A. von Keudell, Applied Physics Letters (2017).
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Journal Article
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| English
Author
Layes, V.;
Monje, S.;
Corbella, C.;
Trieschmann, J.;
de los Arcos de Pedro, Maria TeresaLibreCat;
von Keudell, A.
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Journal Title
Applied Physics Letters
Article Number
081603
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Layes V, Monje S, Corbella C, Trieschmann J, de los Arcos de Pedro MT, von Keudell A. Species transport on the target during high power impulse magnetron sputtering. Applied Physics Letters. Published online 2017. doi:10.1063/1.4976999
Layes, V., Monje, S., Corbella, C., Trieschmann, J., de los Arcos de Pedro, M. T., & von Keudell, A. (2017). Species transport on the target during high power impulse magnetron sputtering. Applied Physics Letters, Article 081603. https://doi.org/10.1063/1.4976999
@article{Layes_Monje_Corbella_Trieschmann_de los Arcos de Pedro_von Keudell_2017, title={Species transport on the target during high power impulse magnetron sputtering}, DOI={10.1063/1.4976999}, number={081603}, journal={Applied Physics Letters}, author={Layes, V. and Monje, S. and Corbella, C. and Trieschmann, J. and de los Arcos de Pedro, Maria Teresa and von Keudell, A.}, year={2017} }
Layes, V., S. Monje, C. Corbella, J. Trieschmann, Maria Teresa de los Arcos de Pedro, and A. von Keudell. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” Applied Physics Letters, 2017. https://doi.org/10.1063/1.4976999.
V. Layes, S. Monje, C. Corbella, J. Trieschmann, M. T. de los Arcos de Pedro, and A. von Keudell, “Species transport on the target during high power impulse magnetron sputtering,” Applied Physics Letters, Art. no. 081603, 2017, doi: 10.1063/1.4976999.
Layes, V., et al. “Species Transport on the Target during High Power Impulse Magnetron Sputtering.” Applied Physics Letters, 081603, 2017, doi:10.1063/1.4976999.
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