Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties

K. Xu, A.R. Chaudhuri, H. Parala, D. Schwendt, T. de los Arcos, H.J. Osten, A. Devi, Journal of Materials Chemistry C (2013).

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Journal Article | Published | English
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Journal of Materials Chemistry C
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3939
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Xu K, Chaudhuri AR, Parala H, et al. Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties. Journal of Materials Chemistry C. 2013. doi:10.1039/c3tc30401a
Xu, K., Chaudhuri, A. R., Parala, H., Schwendt, D., Arcos, T. de los, Osten, H. J., & Devi, A. (2013). Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties. Journal of Materials Chemistry C. https://doi.org/10.1039/c3tc30401a
@article{Xu_Chaudhuri_Parala_Schwendt_Arcos_Osten_Devi_2013, title={Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties}, DOI={10.1039/c3tc30401a}, number={3939}, journal={Journal of Materials Chemistry C}, author={Xu, Ke and Chaudhuri, Ayan Roy and Parala, Harish and Schwendt, Dominik and Arcos, Teresa de los and Osten, H. Jörg and Devi, Anjana}, year={2013} }
Xu, Ke, Ayan Roy Chaudhuri, Harish Parala, Dominik Schwendt, Teresa de los Arcos, H. Jörg Osten, and Anjana Devi. “Atomic Layer Deposition of Er2O3 Thin Films from Er Tris-Guanidinate and Water: Process Optimization, Film Analysis and Electrical Properties.” Journal of Materials Chemistry C, 2013. https://doi.org/10.1039/c3tc30401a.
K. Xu et al., “Atomic layer deposition of Er2O3 thin films from Er tris-guanidinate and water: process optimization, film analysis and electrical properties,” Journal of Materials Chemistry C, 2013.
Xu, Ke, et al. “Atomic Layer Deposition of Er2O3 Thin Films from Er Tris-Guanidinate and Water: Process Optimization, Film Analysis and Electrical Properties.” Journal of Materials Chemistry C, 3939, 2013, doi:10.1039/c3tc30401a.

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