Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching

M. Kismann, T. Riedl, J. Lindner, (2017).

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Conference Paper
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Conference
E-MRS Spring Meeting 2017
Conference Location
Straßburg (France)
Conference Date
2017-05-22 – 2017-05-26
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Kismann M, Riedl T, Lindner J. Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. 2017.
Kismann, M., Riedl, T., & Lindner, J. (2017). Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching. Presented at the E-MRS Spring Meeting 2017, Straßburg (France).
@article{Kismann_Riedl_Lindner_2017, series={Poster P.9.1}, title={Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching}, author={Kismann, Michael and Riedl, Thomas and Lindner, Jörg}, year={2017}, collection={Poster P.9.1} }
Kismann, Michael, Thomas Riedl, and Jörg Lindner. “Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching.” Poster P.9.1, 2017.
M. Kismann, T. Riedl, and J. Lindner, “Morphological properties of nanopillar patterned Si surfaces obtained by nanosphere lithography and metal-assisted wet-chemical etching.” 2017.
Kismann, Michael, et al. Morphological Properties of Nanopillar Patterned Si Surfaces Obtained by Nanosphere Lithography and Metal-Assisted Wet-Chemical Etching. 2017.

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