Piezoresistive pressure sensors in CVD diamond for high-temperature applications
R. Otterbach, U. Hilleringmann, in: G. Zhang, H. Zhao, Z. Wang (Eds.), Fifth International Symposium on Instrumentation and Control Technology, SPIE, 2004.
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Author
Otterbach, Ralf;
Hilleringmann, UlrichLibreCat
Editor
Zhang, Guangjun;
Zhao, Huijie;
Wang, Zhongyu
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Fifth International Symposium on Instrumentation and Control Technology
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Otterbach R, Hilleringmann U. Piezoresistive pressure sensors in CVD diamond for high-temperature applications. In: Zhang G, Zhao H, Wang Z, eds. Fifth International Symposium on Instrumentation and Control Technology. SPIE; 2004. doi:10.1117/12.521928
Otterbach, R., & Hilleringmann, U. (2004). Piezoresistive pressure sensors in CVD diamond for high-temperature applications. In G. Zhang, H. Zhao, & Z. Wang (Eds.), Fifth International Symposium on Instrumentation and Control Technology. SPIE. https://doi.org/10.1117/12.521928
@inproceedings{Otterbach_Hilleringmann_2004, title={Piezoresistive pressure sensors in CVD diamond for high-temperature applications}, DOI={10.1117/12.521928}, booktitle={Fifth International Symposium on Instrumentation and Control Technology}, publisher={SPIE}, author={Otterbach, Ralf and Hilleringmann, Ulrich}, editor={Zhang, Guangjun and Zhao, Huijie and Wang, Zhongyu}, year={2004} }
Otterbach, Ralf, and Ulrich Hilleringmann. “Piezoresistive Pressure Sensors in CVD Diamond for High-Temperature Applications.” In Fifth International Symposium on Instrumentation and Control Technology, edited by Guangjun Zhang, Huijie Zhao, and Zhongyu Wang. SPIE, 2004. https://doi.org/10.1117/12.521928.
R. Otterbach and U. Hilleringmann, “Piezoresistive pressure sensors in CVD diamond for high-temperature applications,” in Fifth International Symposium on Instrumentation and Control Technology, 2004, doi: 10.1117/12.521928.
Otterbach, Ralf, and Ulrich Hilleringmann. “Piezoresistive Pressure Sensors in CVD Diamond for High-Temperature Applications.” Fifth International Symposium on Instrumentation and Control Technology, edited by Guangjun Zhang et al., SPIE, 2004, doi:10.1117/12.521928.
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