Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications
R. Otterbach, U. Hilleringmann, T.J. Horstmann, K. Goser, Diamond and Related Materials 10 (2002) 511–514.
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Journal Article
| Published
| English
Author
Otterbach, R.;
Hilleringmann, UlrichLibreCat;
Horstmann, T.J.;
Goser, K.
Department
Keywords
Publishing Year
Journal Title
Diamond and Related Materials
Volume
10
Issue
3-7
Page
511-514
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Otterbach R, Hilleringmann U, Horstmann TJ, Goser K. Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials. 2002;10(3-7):511-514. doi:10.1016/s0925-9635(01)00373-9
Otterbach, R., Hilleringmann, U., Horstmann, T. J., & Goser, K. (2002). Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials, 10(3–7), 511–514. https://doi.org/10.1016/s0925-9635(01)00373-9
@article{Otterbach_Hilleringmann_Horstmann_Goser_2002, title={Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications}, volume={10}, DOI={10.1016/s0925-9635(01)00373-9}, number={3–7}, journal={Diamond and Related Materials}, publisher={Elsevier BV}, author={Otterbach, R. and Hilleringmann, Ulrich and Horstmann, T.J. and Goser, K.}, year={2002}, pages={511–514} }
Otterbach, R., Ulrich Hilleringmann, T.J. Horstmann, and K. Goser. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.” Diamond and Related Materials 10, no. 3–7 (2002): 511–14. https://doi.org/10.1016/s0925-9635(01)00373-9.
R. Otterbach, U. Hilleringmann, T. J. Horstmann, and K. Goser, “Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications,” Diamond and Related Materials, vol. 10, no. 3–7, pp. 511–514, 2002, doi: 10.1016/s0925-9635(01)00373-9.
Otterbach, R., et al. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.” Diamond and Related Materials, vol. 10, no. 3–7, Elsevier BV, 2002, pp. 511–14, doi:10.1016/s0925-9635(01)00373-9.
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