Doctor blade system for the deposition of thin semiconducting films
D. Petrov, T. Meyers, J. Reker, U. Hilleringmann, in: M. du Plessis (Ed.), Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, SPIE, 2019.
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Petrov, DmitryLibreCat;
Meyers, Thorsten;
Reker, Julia;
Hilleringmann, UlrichLibreCat
Editor
du Plessis, Monuko
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Fifth Conference on Sensors, MEMS, and Electro-Optic Systems
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Petrov D, Meyers T, Reker J, Hilleringmann U. Doctor blade system for the deposition of thin semiconducting films. In: du Plessis M, ed. Fifth Conference on Sensors, MEMS, and Electro-Optic Systems. SPIE; 2019. doi:10.1117/12.2501307
Petrov, D., Meyers, T., Reker, J., & Hilleringmann, U. (2019). Doctor blade system for the deposition of thin semiconducting films. In M. du Plessis (Ed.), Fifth Conference on Sensors, MEMS, and Electro-Optic Systems. SPIE. https://doi.org/10.1117/12.2501307
@inproceedings{Petrov_Meyers_Reker_Hilleringmann_2019, title={Doctor blade system for the deposition of thin semiconducting films}, DOI={10.1117/12.2501307}, booktitle={Fifth Conference on Sensors, MEMS, and Electro-Optic Systems}, publisher={SPIE}, author={Petrov, Dmitry and Meyers, Thorsten and Reker, Julia and Hilleringmann, Ulrich}, editor={du Plessis, Monuko}, year={2019} }
Petrov, Dmitry, Thorsten Meyers, Julia Reker, and Ulrich Hilleringmann. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” In Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, edited by Monuko du Plessis. SPIE, 2019. https://doi.org/10.1117/12.2501307.
D. Petrov, T. Meyers, J. Reker, and U. Hilleringmann, “Doctor blade system for the deposition of thin semiconducting films,” in Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, 2019, doi: 10.1117/12.2501307.
Petrov, Dmitry, et al. “Doctor Blade System for the Deposition of Thin Semiconducting Films.” Fifth Conference on Sensors, MEMS, and Electro-Optic Systems, edited by Monuko du Plessis, SPIE, 2019, doi:10.1117/12.2501307.
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