Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope

M. Versen, B. Klehn, U. Kunze, D. Reuter, A.. Wieck, Ultramicroscopy (2002) 159–163.

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Journal Article | Published | English
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Ultramicroscopy
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159-163
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Versen M, Klehn B, Kunze U, Reuter D, Wieck A. Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope. Ultramicroscopy. 2002:159-163. doi:10.1016/s0304-3991(99)00127-8
Versen, M., Klehn, B., Kunze, U., Reuter, D., & Wieck, A. . (2002). Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope. Ultramicroscopy, 159–163. https://doi.org/10.1016/s0304-3991(99)00127-8
@article{Versen_Klehn_Kunze_Reuter_Wieck_2002, title={Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope}, DOI={10.1016/s0304-3991(99)00127-8}, journal={Ultramicroscopy}, author={Versen, M and Klehn, B and Kunze, U and Reuter, Dirk and Wieck, A.D}, year={2002}, pages={159–163} }
Versen, M, B Klehn, U Kunze, Dirk Reuter, and A.D Wieck. “Nanoscale Devices Fabricated by Direct Machining of GaAs with an Atomic Force Microscope.” Ultramicroscopy, 2002, 159–63. https://doi.org/10.1016/s0304-3991(99)00127-8.
M. Versen, B. Klehn, U. Kunze, D. Reuter, and A. . Wieck, “Nanoscale devices fabricated by direct machining of GaAs with an atomic force microscope,” Ultramicroscopy, pp. 159–163, 2002.
Versen, M., et al. “Nanoscale Devices Fabricated by Direct Machining of GaAs with an Atomic Force Microscope.” Ultramicroscopy, 2002, pp. 159–63, doi:10.1016/s0304-3991(99)00127-8.

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