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3 Publications
2009 | Journal Article | LibreCat-ID: 7497
M. Mehta, M. Ruth, K. A. Piegdon, D. Krix, H. Nienhaus, and C. Meier, “Inductively coupled plasma reactive ion etching of bulk ZnO single crystal and molecular beam epitaxy grown ZnO films,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol. 27, no. 5, 2009.
LibreCat
| DOI
2006 | Journal Article | LibreCat-ID: 8657
D. Reuter, C. Riedesel, and A. D. Wieck, “Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped Al[sub x]Ga[sub 1−x]As,” Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 2006.
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| DOI