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2 Publications
2012 | Journal Article | LibreCat-ID: 39520
Brockmeier, A., Rodriguez, F. J. S., Harrison, M., & Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering, 22(12), Article 125012. https://doi.org/10.1088/0960-1317/22/12/125012
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
Brockmeier, A., Rodriguez, F. J. S., Harrison, M., & Hilleringmann, U. (2012). Surface tension and its role for vertical wet etching of silicon. Journal of Micromechanics and Microengineering, 22(12), Article 125012. https://doi.org/10.1088/0960-1317/22/12/125012
LibreCat
| DOI