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2 Publications
2012 | Journal Article | LibreCat-ID: 39520
@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={10.1088/0960-1317/22/12/125012}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} }
LibreCat
| DOI
2012 | Journal Article | LibreCat-ID: 39522
@article{Brockmeier_Rodriguez_Harrison_Hilleringmann_2012, title={Surface tension and its role for vertical wet etching of silicon}, volume={22}, DOI={10.1088/0960-1317/22/12/125012}, number={12125012}, journal={Journal of Micromechanics and Microengineering}, publisher={IOP Publishing}, author={Brockmeier, A and Rodriguez, F J Santos and Harrison, M and Hilleringmann, Ulrich}, year={2012} }
LibreCat
| DOI