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11 Publications
2012 | Journal Article | LibreCat-ID: 22604
Reuter, R., Rügner, K., Ellerweg, D., de los Arcos de Pedro, M. T., von Keudell, A., & Benedikt, J. (2012). The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure. Plasma Processes and Polymers, 1116–1124. https://doi.org/10.1002/ppap.201100146
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