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11 Publications
2012 | Journal Article | LibreCat-ID: 22604
@article{Reuter_Rügner_Ellerweg_de los Arcos de Pedro_von Keudell_Benedikt_2012, title={The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure}, DOI={10.1002/ppap.201100146}, journal={Plasma Processes and Polymers}, author={Reuter, Rüdiger and Rügner, Katja and Ellerweg, Dirk and de los Arcos de Pedro, Maria Teresa and von Keudell, Achim and Benedikt, Jan}, year={2012}, pages={1116–1124} }
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