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11 Publications
2012 | Journal Article | LibreCat-ID: 22604
R. Reuter, K. Rügner, D. Ellerweg, M. T. de los Arcos de Pedro, A. von Keudell, and J. Benedikt, “The Role of Oxygen and Surface Reactions in the Deposition of Silicon Oxide like Films from HMDSO at Atmospheric Pressure,” Plasma Processes and Polymers, pp. 1116–1124, 2012, doi: 10.1002/ppap.201100146.
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