Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD

D. Kirchheim, S. Wilski, M. Jaritz, F. Mitschker, M. Oberberg, J. Trieschmann, L. Banko, M. Brochhagen, R. Schreckenberg, C. Hopmann, M. Böke, J. Benedikt, T. de los Arcos, G. Grundmeier, D. Grochla, A. Ludwig, T. Mussenbrock, R.P. Brinkmann, P. Awakowicz, R. Dahlmann, Journal of Coatings Technology and Research (2018) 573–583.

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Journal of Coatings Technology and Research
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573-583
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Kirchheim D, Wilski S, Jaritz M, et al. Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD. Journal of Coatings Technology and Research. 2018:573-583. doi:10.1007/s11998-018-0138-4
Kirchheim, D., Wilski, S., Jaritz, M., Mitschker, F., Oberberg, M., Trieschmann, J., … Dahlmann, R. (2018). Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD. Journal of Coatings Technology and Research, 573–583. https://doi.org/10.1007/s11998-018-0138-4
@article{Kirchheim_Wilski_Jaritz_Mitschker_Oberberg_Trieschmann_Banko_Brochhagen_Schreckenberg_Hopmann_et al._2018, title={Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD}, DOI={10.1007/s11998-018-0138-4}, journal={Journal of Coatings Technology and Research}, author={Kirchheim, Dennis and Wilski, Stefan and Jaritz, Montgomery and Mitschker, Felix and Oberberg, Moritz and Trieschmann, Jan and Banko, Lars and Brochhagen, Markus and Schreckenberg, Rabea and Hopmann, Christian and et al.}, year={2018}, pages={573–583} }
Kirchheim, Dennis, Stefan Wilski, Montgomery Jaritz, Felix Mitschker, Moritz Oberberg, Jan Trieschmann, Lars Banko, et al. “Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD.” Journal of Coatings Technology and Research, 2018, 573–83. https://doi.org/10.1007/s11998-018-0138-4.
D. Kirchheim et al., “Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD,” Journal of Coatings Technology and Research, pp. 573–583, 2018.
Kirchheim, Dennis, et al. “Improved Homogeneity of Plasma and Coating Properties Using a Lance Matrix Gas Distribution in MW-PECVD.” Journal of Coatings Technology and Research, 2018, pp. 573–83, doi:10.1007/s11998-018-0138-4.

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