Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence

F. Mitschker, S. Steves, M. Gebhard, M. Rudolph, L. Schücke, D. Kirchheim, M. Jaritz, M. Brochhagen, C. Hoppe, R. Dahlmann, M. Böke, J. Benedikt, I. Giner, T. de los Arcos, C. Hopmann, G. Grundmeier, A. Devi, P. Awakowicz, Journal of Physics D: Applied Physics (2017).

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Journal of Physics D: Applied Physics
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235201
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Mitschker F, Steves S, Gebhard M, et al. Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. Journal of Physics D: Applied Physics. 2017. doi:10.1088/1361-6463/aa6e28
Mitschker, F., Steves, S., Gebhard, M., Rudolph, M., Schücke, L., Kirchheim, D., … Awakowicz, P. (2017). Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/aa6e28
@article{Mitschker_Steves_Gebhard_Rudolph_Schücke_Kirchheim_Jaritz_Brochhagen_Hoppe_Dahlmann_et al._2017, title={Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence}, DOI={10.1088/1361-6463/aa6e28}, number={235201}, journal={Journal of Physics D: Applied Physics}, author={Mitschker, F and Steves, S and Gebhard, M and Rudolph, M and Schücke, L and Kirchheim, D and Jaritz, M and Brochhagen, M and Hoppe, Ch and Dahlmann, R and et al.}, year={2017} }
Mitschker, F, S Steves, M Gebhard, M Rudolph, L Schücke, D Kirchheim, M Jaritz, et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” Journal of Physics D: Applied Physics, 2017. https://doi.org/10.1088/1361-6463/aa6e28.
F. Mitschker et al., “Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence,” Journal of Physics D: Applied Physics, 2017.
Mitschker, F., et al. “Influence of PE-CVD and PE-ALD on Defect Formation in Permeation Barrier Films on PET and Correlation to Atomic Oxygen Fluence.” Journal of Physics D: Applied Physics, 235201, 2017, doi:10.1088/1361-6463/aa6e28.

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