Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS
C. Hoppe, F. Mitschker, L. Mai, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Devi, A.G. Attallah, M. Butterling, A. Wagner, G. Grundmeier, Plasma Processes and Polymers 19 (2022).
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Journal Article
| Published
| English
Author
Hoppe, Christian;
Mitschker, Felix;
Mai, Lukas;
Liedke, Maciej Oskar;
de los Arcos de Pedro, Maria TeresaLibreCat;
Awakowicz, Peter;
Devi, Anjana;
Attallah, Ahmed Gamal;
Butterling, Maik;
Wagner, Andreas;
Grundmeier, Guido
Department
Publishing Year
Journal Title
Plasma Processes and Polymers
Volume
19
Issue
4
Article Number
2100174
LibreCat-ID
Cite this
Hoppe C, Mitschker F, Mai L, et al. Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers. 2022;19(4). doi:10.1002/ppap.202100174
Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., & Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174. https://doi.org/10.1002/ppap.202100174
@article{Hoppe_Mitschker_Mai_Liedke_de los Arcos de Pedro_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS}, volume={19}, DOI={10.1002/ppap.202100174}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and de los Arcos de Pedro, Maria Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }
Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Maria Teresa de los Arcos de Pedro, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO x Thin Films on PDMS.” Plasma Processes and Polymers 19, no. 4 (2022). https://doi.org/10.1002/ppap.202100174.
C. Hoppe et al., “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO x thin films on PDMS,” Plasma Processes and Polymers, vol. 19, no. 4, Art. no. 2100174, 2022, doi: 10.1002/ppap.202100174.
Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO x Thin Films on PDMS.” Plasma Processes and Polymers, vol. 19, no. 4, 2100174, Wiley, 2022, doi:10.1002/ppap.202100174.
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