Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results
U. Hilleringmann, S. Adam, K. Goser, in: ESSDtRC’93, 1993.
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Hilleringmann, UlrichLibreCat;
Adam, S;
Goser, K
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ESSDtRC’93
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Hilleringmann U, Adam S, Goser K. Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. In: ESSDtRC’93. ; 1993.
Hilleringmann, U., Adam, S., & Goser, K. (1993). Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results. ESSDtRC’93.
@inproceedings{Hilleringmann_Adam_Goser_1993, title={Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results}, booktitle={ESSDtRC’93}, author={Hilleringmann, Ulrich and Adam, S and Goser, K}, year={1993} }
Hilleringmann, Ulrich, S Adam, and K Goser. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and First Results.” In ESSDtRC’93, 1993.
U. Hilleringmann, S. Adam, and K. Goser, “Micromechanic pressure sensors with optical readout and CMOS-preamplifiers on one silicon chip: Processing and first results,” 1993.
Hilleringmann, Ulrich, et al. “Micromechanic Pressure Sensors with Optical Readout and CMOS-Preamplifiers on One Silicon Chip: Processing and First Results.” ESSDtRC’93, 1993.
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