Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene

M. Knop, M. Richter, R. Maßmann, U. Wieser, U. Kunze, D. Reuter, C. Riedesel, A.D. Wieck, Semiconductor Science and Technology (2005) 814–818.

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Journal Article | Published | English
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Semiconductor Science and Technology
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814-818
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Knop M, Richter M, Maßmann R, et al. Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene. Semiconductor Science and Technology. 2005:814-818. doi:10.1088/0268-1242/20/8/031
Knop, M., Richter, M., Maßmann, R., Wieser, U., Kunze, U., Reuter, D., … Wieck, A. D. (2005). Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene. Semiconductor Science and Technology, 814–818. https://doi.org/10.1088/0268-1242/20/8/031
@article{Knop_Richter_Maßmann_Wieser_Kunze_Reuter_Riedesel_Wieck_2005, title={Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene}, DOI={10.1088/0268-1242/20/8/031}, journal={Semiconductor Science and Technology}, author={Knop, M and Richter, M and Maßmann, R and Wieser, U and Kunze, U and Reuter, Dirk and Riedesel, C and Wieck, A D}, year={2005}, pages={814–818} }
Knop, M, M Richter, R Maßmann, U Wieser, U Kunze, Dirk Reuter, C Riedesel, and A D Wieck. “Preparation of Electron Waveguide Devices on GaAs/AlGaAs Using Negative-Tone Resist Calixarene.” Semiconductor Science and Technology, 2005, 814–18. https://doi.org/10.1088/0268-1242/20/8/031.
M. Knop et al., “Preparation of electron waveguide devices on GaAs/AlGaAs using negative-tone resist calixarene,” Semiconductor Science and Technology, pp. 814–818, 2005.
Knop, M., et al. “Preparation of Electron Waveguide Devices on GaAs/AlGaAs Using Negative-Tone Resist Calixarene.” Semiconductor Science and Technology, 2005, pp. 814–18, doi:10.1088/0268-1242/20/8/031.

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