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1 Publication
2011 | Conference Paper | LibreCat-ID: 4546
Frers, Torsten, Thomas Hett, Ulrich Hilleringmann, Gerhard Berth, Alex Widhalm, and Artur Zrenner. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” In 2011 Semiconductor Conference Dresden. IEEE, 2011. https://doi.org/10.1109/scd.2011.6068744.
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