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1 Publication


2011 | Conference Paper | LibreCat-ID: 4546
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, and A. Zrenner, “Characterization of SiON integrated waveguides via FTIR and AFM measurements,” in 2011 Semiconductor Conference Dresden, Dresden, Germany, 2011.
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