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1 Publication
2011 | Conference Paper | LibreCat-ID: 4546
Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization of SiON integrated waveguides via FTIR and AFM measurements. In: 2011 Semiconductor Conference Dresden. IEEE; 2011. doi:10.1109/scd.2011.6068744
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