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2 Publications
2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., Hilleringmann, U., Horstmann, T. J., & Goser, K. (2002). Structures with a minimum feature size of less than 100 nm in CVD-diamond for sensor applications. Diamond and Related Materials, 10(3–7), 511–514. https://doi.org/10.1016/s0925-9635(01)00373-9
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., & Hilleringmann, U. (2002). Reactive ion etching of CVD-diamond for piezoresistive pressure sensors. Diamond and Related Materials, 11(3–6), 841–844. https://doi.org/10.1016/s0925-9635(01)00703-8
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| DOI