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2 Publications
2002 | Journal Article | LibreCat-ID: 39876
Otterbach, R., Ulrich Hilleringmann, T.J. Horstmann, and K. Goser. “Structures with a Minimum Feature Size of Less than 100 Nm in CVD-Diamond for Sensor Applications.” Diamond and Related Materials 10, no. 3–7 (2002): 511–14. https://doi.org/10.1016/s0925-9635(01)00373-9.
LibreCat
| DOI
2002 | Journal Article | LibreCat-ID: 39874
Otterbach, R., and Ulrich Hilleringmann. “Reactive Ion Etching of CVD-Diamond for Piezoresistive Pressure Sensors.” Diamond and Related Materials 11, no. 3–6 (2002): 841–44. https://doi.org/10.1016/s0925-9635(01)00703-8.
LibreCat
| DOI