Characterization of SiON integrated waveguides via FTIR and AFM measurements
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, A. Zrenner, in: 2011 Semiconductor Conference Dresden, IEEE, 2011.
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Frers, Torsten;
Hett, Thomas;
Hilleringmann, UlrichLibreCat;
Berth, Gerhard;
Widhalm, Alex;
Zrenner, Artur
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2011 Semiconductor Conference Dresden
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Frers T, Hett T, Hilleringmann U, Berth G, Widhalm A, Zrenner A. Characterization of SiON integrated waveguides via FTIR and AFM measurements. In: 2011 Semiconductor Conference Dresden. IEEE; 2011. doi:10.1109/scd.2011.6068744
Frers, T., Hett, T., Hilleringmann, U., Berth, G., Widhalm, A., & Zrenner, A. (2011). Characterization of SiON integrated waveguides via FTIR and AFM measurements. 2011 Semiconductor Conference Dresden. https://doi.org/10.1109/scd.2011.6068744
@inproceedings{Frers_Hett_Hilleringmann_Berth_Widhalm_Zrenner_2011, title={Characterization of SiON integrated waveguides via FTIR and AFM measurements}, DOI={10.1109/scd.2011.6068744}, booktitle={2011 Semiconductor Conference Dresden}, publisher={IEEE}, author={Frers, Torsten and Hett, Thomas and Hilleringmann, Ulrich and Berth, Gerhard and Widhalm, Alex and Zrenner, Artur}, year={2011} }
Frers, Torsten, Thomas Hett, Ulrich Hilleringmann, Gerhard Berth, Alex Widhalm, and Artur Zrenner. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” In 2011 Semiconductor Conference Dresden. IEEE, 2011. https://doi.org/10.1109/scd.2011.6068744.
T. Frers, T. Hett, U. Hilleringmann, G. Berth, A. Widhalm, and A. Zrenner, “Characterization of SiON integrated waveguides via FTIR and AFM measurements,” 2011, doi: 10.1109/scd.2011.6068744.
Frers, Torsten, et al. “Characterization of SiON Integrated Waveguides via FTIR and AFM Measurements.” 2011 Semiconductor Conference Dresden, IEEE, 2011, doi:10.1109/scd.2011.6068744.
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