Characterisation of micropores in plasma deposited SiO x films by means of positron annihilation lifetime spectroscopy

C. Hoppe, F. Mitschker, M. Butterling, M.O. Liedke, T. de Los Arcos, P. Awakowicz, A. Wagner, G. Grundmeier, Journal of Physics D: Applied Physics (2020).

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Journal Article | Published | English
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Journal of Physics D: Applied Physics
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475205
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Hoppe C, Mitschker F, Butterling M, et al. Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy. Journal of Physics D: Applied Physics. 2020. doi:10.1088/1361-6463/aba8ba
Hoppe, C., Mitschker, F., Butterling, M., Liedke, M. O., de Los Arcos, T., Awakowicz, P., … Grundmeier, G. (2020). Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy. Journal of Physics D: Applied Physics. https://doi.org/10.1088/1361-6463/aba8ba
@article{Hoppe_Mitschker_Butterling_Liedke_de Los Arcos_Awakowicz_Wagner_Grundmeier_2020, title={Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy}, DOI={10.1088/1361-6463/aba8ba}, number={475205}, journal={Journal of Physics D: Applied Physics}, author={Hoppe, C and Mitschker, F and Butterling, M and Liedke, M O and de Los Arcos, T and Awakowicz, P and Wagner, A and Grundmeier, G}, year={2020} }
Hoppe, C, F Mitschker, M Butterling, M O Liedke, T de Los Arcos, P Awakowicz, A Wagner, and G Grundmeier. “Characterisation of Micropores in Plasma Deposited SiO x  Films by Means of Positron Annihilation Lifetime Spectroscopy.” Journal of Physics D: Applied Physics, 2020. https://doi.org/10.1088/1361-6463/aba8ba.
C. Hoppe et al., “Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy,” Journal of Physics D: Applied Physics, 2020.
Hoppe, C., et al. “Characterisation of Micropores in Plasma Deposited SiO x  Films by Means of Positron Annihilation Lifetime Spectroscopy.” Journal of Physics D: Applied Physics, 475205, 2020, doi:10.1088/1361-6463/aba8ba.

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