Characterisation of micropores in plasma deposited SiO x films by means of positron annihilation lifetime spectroscopy

C. Hoppe, F. Mitschker, M. Butterling, M.O. Liedke, M.T. de los Arcos de Pedro, P. Awakowicz, A. Wagner, G. Grundmeier, Journal of Physics D: Applied Physics (2020).

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Journal Article | Published | English
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Hoppe, C; Mitschker, F; Butterling, M; Liedke, M O; de los Arcos de Pedro, Maria TeresaLibreCat; Awakowicz, P; Wagner, A; Grundmeier, GuidoLibreCat
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Journal of Physics D: Applied Physics
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475205
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Hoppe C, Mitschker F, Butterling M, et al. Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy. Journal of Physics D: Applied Physics. Published online 2020. doi:10.1088/1361-6463/aba8ba
Hoppe, C., Mitschker, F., Butterling, M., Liedke, M. O., de los Arcos de Pedro, M. T., Awakowicz, P., Wagner, A., & Grundmeier, G. (2020). Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy. Journal of Physics D: Applied Physics, Article 475205. https://doi.org/10.1088/1361-6463/aba8ba
@article{Hoppe_Mitschker_Butterling_Liedke_de los Arcos de Pedro_Awakowicz_Wagner_Grundmeier_2020, title={Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy}, DOI={10.1088/1361-6463/aba8ba}, number={475205}, journal={Journal of Physics D: Applied Physics}, author={Hoppe, C and Mitschker, F and Butterling, M and Liedke, M O and de los Arcos de Pedro, Maria Teresa and Awakowicz, P and Wagner, A and Grundmeier, Guido}, year={2020} }
Hoppe, C, F Mitschker, M Butterling, M O Liedke, Maria Teresa de los Arcos de Pedro, P Awakowicz, A Wagner, and Guido Grundmeier. “Characterisation of Micropores in Plasma Deposited SiO x  Films by Means of Positron Annihilation Lifetime Spectroscopy.” Journal of Physics D: Applied Physics, 2020. https://doi.org/10.1088/1361-6463/aba8ba.
C. Hoppe et al., “Characterisation of micropores in plasma deposited SiO x  films by means of positron annihilation lifetime spectroscopy,” Journal of Physics D: Applied Physics, Art. no. 475205, 2020, doi: 10.1088/1361-6463/aba8ba.
Hoppe, C., et al. “Characterisation of Micropores in Plasma Deposited SiO x  Films by Means of Positron Annihilation Lifetime Spectroscopy.” Journal of Physics D: Applied Physics, 475205, 2020, doi:10.1088/1361-6463/aba8ba.

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