Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO _x thin films on PDMS

Hoppe, C., Mitschker, F., Mai, L., Liedke, M. O., Arcos, T., Awakowicz, P., Devi, A., Attallah, A. G., Butterling, M., Wagner, A., & Grundmeier, G. (2022). Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO                          _x                        thin films on PDMS. Plasma Processes and Polymers, 19(4), Article 2100174. https://doi.org/10.1002/ppap.202100174

@article{Hoppe_Mitschker_Mai_Liedke_Arcos_Awakowicz_Devi_Attallah_Butterling_Wagner_et al._2022, title={Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO                          _x                        thin films on PDMS}, volume={19}, DOI={10.1002/ppap.202100174}, number={42100174}, journal={Plasma Processes and Polymers}, publisher={Wiley}, author={Hoppe, Christian and Mitschker, Felix and Mai, Lukas and Liedke, Maciej Oskar and Arcos, Teresa and Awakowicz, Peter and Devi, Anjana and Attallah, Ahmed Gamal and Butterling, Maik and Wagner, Andreas and et al.}, year={2022} }

Hoppe, Christian, Felix Mitschker, Lukas Mai, Maciej Oskar Liedke, Teresa Arcos, Peter Awakowicz, Anjana Devi, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO                          _x                        Thin Films on PDMS.” Plasma Processes and Polymers 19, no. 4 (2022). https://doi.org/10.1002/ppap.202100174.

C. Hoppe et al., “Influence of surface activation on the microporosity of PE‐CVD and PE‐ALD SiO                          _x                        thin films on PDMS,” Plasma Processes and Polymers, vol. 19, no. 4, Art. no. 2100174, 2022, doi: 10.1002/ppap.202100174.

Hoppe, Christian, et al. “Influence of Surface Activation on the Microporosity of PE‐CVD and PE‐ALD SiO                          _x                        Thin Films on PDMS.” Plasma Processes and Polymers, vol. 19, no. 4, 2100174, Wiley, 2022, doi:10.1002/ppap.202100174.