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1 Publication
2004 | Book Chapter | LibreCat-ID: 39850
@inbook{Hilleringmann_2004, place={Wiesbaden}, title={Ätztechnik}, DOI={10.1007/978-3-322-94072-8_5}, booktitle={Silizium-Halbleitertechnologie}, publisher={Vieweg+Teubner Verlag}, author={Hilleringmann, Ulrich}, year={2004}, pages={65–90} }
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