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1 Publication
2004 | Book Chapter | LibreCat-ID: 39850
Hilleringmann, Ulrich. “Ätztechnik.” In Silizium-Halbleitertechnologie, 65–90. Wiesbaden: Vieweg+Teubner Verlag, 2004. https://doi.org/10.1007/978-3-322-94072-8_5.
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